Isifinyezo Esiningiliziwe Sezinhloko Zokushisela Ze-Flying Laser

Isifinyezo Esiningiliziwe Se-Amakhanda Okushisela E-Flying Laser

Ihlanganisa amagama ezingxenye, izincazelo, izimiso, amapharamitha okuklama kanye nokubalwa kwefomula, futhi iyasebenza kuukushisela kokuskena okusheshayo(njengezinhlelo ze-galvanometer) noma izinhlelo zokushisela ezikude.

1. Ukwakheka kanye nencazelo yamakhanda okushisela e-laser okundizayo

Ukushisela okundizayo (Ukuskena Ukushisela Nge-Laser) kufeza ukugxila okunamandla nge-galvanometer yesivinini esikhulu ekhombisa imisebe ye-laser, futhi kufanelekile ezindaweni ezinkulu kanyeukushisela okusheshayoIzingxenye zayo eziyinhloko yilezi ezilandelayo:

1. Imodyuli Yokuhlanganisa Ama-Beam

I-Collimator

Umsebenzi: Guqula i-divergent laser output (NA=0.1~0.22) nge-optical fiber ibe yi-parallel beam.

Amapharamitha ayisihluthulelo: Ubude be-focal fcoll, ububanzi be-collimated beam Dcoll.

Ifomula:

1.2 Uhlelo Lokuskena lwe-Galvanometer

Izibuko ze-Galvo ze-X/Y-axis

Umsebenzi: Shintsha indlela yokukhanya ngokusebenzisa izibuko ezijikelezayo ngesivinini esikhulu ukuze ufinyelele ukuskena kwendiza okunezinhlangothi ezimbili.

Amapharamitha ayisihluthulelo: Isivinini sokuskena (ngokuvamile ≥10m/s), ukunemba kokubeka okuphindaphindiwe (<±5μrad), usayizi wesibuko (kudingeka ukumboza ububanzi be-beam Dcoll).

Injini ye-Galvanometer: Injini ye-Servo noma i-galvanometer enesikhathi sokuphendula esingu-<1ms.

1.3 I-Dynamic Focusing Module (Ilensi ye-F-Theta noma i-Galvanometer + Ilensi ye-Flat-Field)

Ilensi ye-F-Theta

Umsebenzi: Guqula i-engeli yokuphambuka kwe-galvanometer ibe ukuhamba okuqondile endizeni ukuze kulondolozwe ukuqina kokugxila.

Amafomula ayisihluthulelo:

2. Isimiso Sokusebenza

Indlela yokukhanya: I-Laser → I-Collimator → I-galvanometer ye-X → I-galvanometer ye-Y → Ilensi ye-F-Theta → Indawo yokusebenza.

Ukugxila okunamandla:

Uma i-angle yokuphambuka kwe-galvanometer ingu-θ, indawo yokugxila (x, y) iguqulwa ilensi ye-F-Theta njenge:

3. Amapharamitha Okuklama Okuyinhloko Namafomula

3.1 Ukubalwa Kosayizi Wendawo

Ububanzi bendawo egxilile d (umkhawulo wokuhlukanisa):

3.2 Ibanga Lokuskena kanye ne-Galvanometer Angle

Ibanga eliphezulu lokuskena L:

3.3 Isivinini Sokushisela Nokusheshisa

Ijubane eliqondile v

3.4 Ukujula Kokugxila (DOF)

3.5 Ubuningi Bamandla Nokufaka Amandla

Ubuningi bamandla I:

Ubuningi bamandla E (ukushisela kwe-pulse):

4. Ukwakheka Okungafanele kanye Nokwenza Kusebenze Kahle

4.1 Ukulungiswa Kokuphazamiseka Kwelensi Ye-F-Theta

Ukuhlanekezela: Kudingeka kuhlangabezane ne-r∝θ, futhi ukuhlanekezela okungeyona imigqa kufanele kube <0.1%.

Ukugoba kwensimu: Yakha insimu eyisicaba ngamaqembu anamalensi amaningi.

4.2 Iphutha Lokuvumelanisa I-Galvanometer

Ukulibaziseka kwe-X/Y galvanometer kufanele kube <1μs ukuze kugwenywe izindawo ezi-elliptical.

5. Isibonelo Senqubo Yokuklama

Izidingo zokufaka: Ibanga lokuskena L, usayizi webala d, isivinini sokushisela v. Khetha ilensi ye-F-Theta: Nquma i-fθ ngokuya nge-L=2fθtan(θmax).

Bala amapharamitha e-galvanometer: Ijubane le-angular ω=v/fθ, bese uqinisekisa ukusebenza kwe-galvanometer.

Qinisekisa ikhwalithi yendawo: Lungiselela ukuguquguquka kweqembu lelensi nge-Zemax/OpticStudio.

6. Izinyathelo Zokuqapha

Ukuphathwa kokushisa: Ama-Galvanometer namalensi adinga ukupholisa amanzi ngaphansi kwamandla aphezulu (njenge->1kW).

Ukuvikelwa kokungqubuzana: Ama-Galvanometer adinga ukubhuleka okuphuthumayo ukuze agweme ukungqubuzana komshini.

Ukulinganisa: Linganisa njalo i-optical path coaxiality (ukuphambuka <0.05mm).